Effects of Fluorocarbon Films on CF Radical in CF_4/H_2 Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-07-30

著者

• Horikoshi Keita

  Department Of Electrical Engineering Kanagawa Institute Of Technology

• ARAI Toshihiko

  Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology

• GOTO Miki

  Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology

• Goto M

  Matsushita Electric Industrial Co.

• Arai Takeshi

  The Faculty Of Engineering Saitama University

• Mashino Souichi

  Department of Electrical Engineering, Kanagawa Institute of Technology

• Aikyo Satoshi

  Department of Electrical Engineering, Kanagawa Institute of Technology

• GOTO Masashi

  Matsushita Electric Industrial Co.

• 新井 豊子

  金大院自然

• Goto Miki

  Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology

• Aikyo Satoshi

  Department Of Electrical Engineering Kanagawa Institute Of Technology

• Arai Toshihiko

  Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology

• Mashino Souichi

  Department Of Electrical Engineering Kanagawa Institute Of Technology

• Goto Makoto

  Department Of Electronic Engineering Gunma University

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