Plasma Parameters in Low-Pressure Ar-Hg Discharge Plasma Used for Liquid Crystal Display Back-Lighting
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概要
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The electron temperature and electron density in the tube axis of a low-pressure Ar-Hg discharge lamp with 4 mm bore diameter have been measured under various bath temperatures with a probe method. Results show that the relative changes in the bath temperature dependence of electron temperature and electron density are similar to those obtained in the 36 mm I.D. discharge tubes. However, the electron temperature values are twice as large. The electron densities measured by the four methods used here are in good agreement with one another, indicating the reliability of the results.
- 社団法人応用物理学会の論文
- 1994-06-15
著者
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Goto M
Japan Atomic Energy Res. Inst. Osaka Jpn
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Goto Miki
Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology
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Sakai Takayuki
Oki Electric Industry Co. Ltd.
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Arai Toshihiko
Department Of Electrical And Electronic Engineering Kanagawa Institute Of Technology
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