ESR of Diamond Films Deposited by CVD Method
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概要
- 論文の詳細を見る
Defect structures in diamond films prepared by CVD method have been studied using electron spin resonance (ESR) method. ESR signals were compared with those of IIb type natural diamond and amorphous carbon to investigate the defect structures in CVD-diamond films. Two kinds of ESR centers were observed in CVD-diamond films. That is, one is a narrow ESR center (g=2.003,ΔH_<PP>=3 Oe) originated from carbon dangling bonds in diamond phase carbon, and the other is a broad ESR center (g=2.003,ΔH_<PP>=8 Oe) originated from carbon dangling bonds in non-diamond phase carbon region. The broad ESR center is the characteristic of the defect structures in CVD-diamond films. The broad ESR center exists in surface region of CVD-diamond films with spin density of 10^<20> spins/cm^3.
- 東海大学の論文
著者
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IZUMI Tomio
Department of Electronic Engineering, Faculty of Engineering, Tokai University
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Iwase Mitsuo
Department Of Electrical Engineering School Of Engineering
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Iwase Mitsuo
Department Of Electrical Engeneering Tokai University
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Show Yoshiyuki
Course Of Electronics Graduate School Of Engineering
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Izumi Tomio
Department Of Electronics School Of Engineering
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