Kinetics of CF_x (x = 1-3) Radicals and Electrons in RF CF_4-H_2, CHF_3-H_2 and CHF_3-O_2 Plasmas

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-07-15

著者

• Maruyama Kenji

  Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi

• GOTO Toshio

  Department of Quantum Engineering, Nagoya University

• Maruyama K

  Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi

• MARUYAMA Koji

  Department of Quantum Engineering, Nagoya University

• OHKOUCHI Katsunori

  Department of Information Electronics, Nagoya University

• Maruyama Kei-ichi

  Faculty Of Science And Technology Science University Of Tokyo

• Ohkouchi Katsunori

  Department Of Information Electronics Nagoya University

• Goto Toshio

  Department Of Electronics Faculty Of Engineering Nagoya University

• 後藤 俊夫

  Imram Tohoku University

• Maruyama Koji

  Department Of Aerospace Engineering Osaka Prefecture University

• Goto Toshio

  Department Of Electronic Mechanical Engineering Nagoya University

• GOTO Toshio

  Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University

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