Ohkouchi Katsunori | Department Of Information Electronics Nagoya University
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概要
関連著者
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Maruyama Kenji
Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi
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GOTO Toshio
Department of Quantum Engineering, Nagoya University
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Maruyama K
Telecommunications Advncement Organization Of Japan Sendai Research Center:graduate School Of Materi
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MARUYAMA Koji
Department of Quantum Engineering, Nagoya University
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OHKOUCHI Katsunori
Department of Information Electronics, Nagoya University
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Maruyama Kei-ichi
Faculty Of Science And Technology Science University Of Tokyo
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Ohkouchi Katsunori
Department Of Information Electronics Nagoya University
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Goto Toshio
Department Of Electronics Faculty Of Engineering Nagoya University
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Maruyama Koji
Department Of Aerospace Engineering Osaka Prefecture University
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Goto Toshio
Department Of Electronic Mechanical Engineering Nagoya University
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GOTO Toshio
Department of Agricultural Chemistry, Faculty of Agriculture, Nagoya University
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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Ohtsu Yasunori
Department Of Electrical Engineering Saga University
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Ohtsu Yasunori
Department Of Electrical & Electronic Engineering Saga University
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後藤 俊夫
Imram Tohoku University
著作論文
- Kinetics of CF_x (x = 1-3) Radicals and Electrons in RF CF_4-H_2, CHF_3-H_2 and CHF_3-O_2 Plasmas
- CF_3, CF_2 and CF Radical Measurements in RF CHF_3 Etching Plasma Using Infrared Diode Laser Absorption Spectroscopy ( Plasma Processing)