Floating Gate Metal–Oxide–Semiconductor Capacitor Employing Array of High-Density Nanodots Produced by Protein Supramolecule
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概要
- 論文の詳細を見る
An array of high-density $1.8\times 10^{12}$ cm-2 floating nanodots was embedded within a metal–oxide–semiconductor (MOS) capacitor using a cage-shaped protein supramolecule, Listeria ferritin (Lis-fer). A monolayer of Lis-fer with a 4.5 nm ferrihydrite core was adsorbed on a 3 nm tunneling SiO2 layer on a p-Si substrate by 3-aminopropyl-triethoxysilane (APTES) surface modification. The outer protein was selectively removed and the obtained cores were covered with a 20-nm-thick control SiO2 layer and an aluminum electrode. The MOS capacitor was annealed in reducing gas ($\text{H$_{2}$}:\text{N$_{2}$}=10:90$%), and the embedded cores were reduced to conductive nanodots. The capacitance–voltage characteristics of the MOS capacitor measured at 1 MHz by applying a DC bias voltage from $-5$ to $+5$ V showed a clear hysteresis. This result indicates that the array of nanodots produced and positioned by Lis-fer has the ability for electron confinement.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-11-15
著者
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MIURA Atsushi
Graduate School of Materials Science, Nara Institute of Science and Technology
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MIURA Atsushi
Division of Chemistry, Graduate School of Science, Hokkaido University
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Kumagai Shinya
Advanced Technology Research Laboratories Panasonic Corporation
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Yoshii Shigeo
Advanced Technology Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Fuyuki Takashi
Graduate School Of Material Science Nara Institute Of Science And Technology
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Yamada Kiyohito
Advanced Technology Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Miura Atsushi
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Uraoka Yukiharu
Graduate School Of Materials Science Nara Institute Of Science And Technology
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Yamashita Ichiro
Advanced Technology Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Miura Atsushi
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan
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Uraoka Yukiharu
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan
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Uraoka Yukiharu
Graduate School of Material Science, Nara Institute of Science and Technology, Takayama 8916-5, Ikoma, Nara 630-0192, Japan
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