Direct Production of a Two-Dimensional Ordered Array of Ferritin-Nanoparticles on a Silicon Substrate
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概要
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We have proposed a Bio Nano process that is a bottom-up technique using protein supramolecules for the fabrication of nanoelectronic devices that exceed the limits imposed by conventional lithography. One of its features is a nanostructure, for example, a two-dimensional (2D) ordered array using protein self-assembly. In this study, we show that a 2D ordered array with nanoparticles forms on a thermally-oxidized silicon substrate by using a solution without metals or sodium ions, which cause malfunctions of semiconductor devices. Furthermore, after protein elimination by UV-ozone treatment, a 2D ordered array was confirmed. The clarification of the principle of a 2D ordered array will be promoted in the future.
- 2007-07-25
著者
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Iwahori Kenji
Crest Japan Science And Technology Agency
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Matsukawa Nozomu
Advanced Technology Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Yamashita Ichiro
Advanced Technology Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Sano Ken-Ichi
CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
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Shiba Kiyotaka
CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
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Matsui Takuro
Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd. (Panasonic), 3-4 Hikaridai, Seika-cho, Soraku-gun, Kyoto 619-0237, Japan
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Iwahori Kenji
CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
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Yamashita Ichiro
Advanced Technology Research Laboratories, Matsushita Electric Industrial Co., Ltd. (Panasonic), 3-4 Hikaridai, Seika-cho, Soraku-gun, Kyoto 619-0237, Japan
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