Controlled Reduction of Bionanodots for Better Charge Storage Characteristics of Bionanodots Flash Memory
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概要
- 論文の詳細を見る
We proposed a new process technology, named the "bio-nano-process", in which semiconductor processing technology and biotechnology are conbined. We utilized a ferritin protein cobalt core as a memory node, and succeeded in performing the operation of floating gate memory. In this study, we undertook the reduction control of a cobalt core embedded in silicon oxide by thermal annealing. We also fabricated metal–oxide–semiconductor (MOS) capacitors with using the cobalt core and evaluated their electronic properties. As a result, we could elucidate the contribution of the metallic cobalt in the core by controlling of the ambient and temperature. We found that memory windows become large with increasing contribution of metallic cobalt.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-04-25
著者
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MIURA Atsushi
Nara Institute of Science and Technology
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URAOKA Yukiharu
Nara Institute of Science and Technology
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MIURA Atsushi
Graduate School of Materials Science, Nara Institute of Science and Technology
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MIURA Atsushi
Division of Chemistry, Graduate School of Science, Hokkaido University
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Fuyuki Takashi
Nara Inst. Sci. And Technol. Nara Jpn
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Yamashita Ichiro
Nara Inst. Sci. And Technol.
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Tojo Yosuke
Nara Institute of Science and Technology, 8916-5 Takayamacho, Ikoma, Nara 630-0192, Japan
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Miura Atsushi
Graduate School of Materials Science, Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0101, Japan
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Fuyuki Takashi
Nara Institute of Science and Technology, 8916-5 Takayamacho, Ikoma, Nara 630-0192, Japan
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