Low Temperature Polycrystalline Silicon Thin Film Transistors Flash Memory with Silicon Nanocrystal Dot

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概要

• 論文の詳細を見る

• We fabricated a flash memory by embedding a Si nanocrystal dot as the floating node for a low temperature polycrystalline silicon (poly-Si) thin film transistor (LTPS-TFT). Transmission electron microscopy (TEM) and scanning electron microscopy (SEM) analyses revealed that the average Si dot size and density were approximately 5 nm and $8.5\times 10^{11}$ cm-2, respectively. Electron charging and discharging were clearly confirmed at room temperature by the transient behavior of the transfer curve. Furthermore, we evaluated the electronic behavior by varying the bias condition. For an improvement of the retention time and the electronic properties, high-pressure vapor annealing (HPVA), which exhibits even better performance for the fabrication of high-quality flash memory, was employed.

• Japan Society of Applied Physicsの論文
• 2007-07-25

著者

• URAOKA Yukiharu

  Nara Institute of Science and Technology

• HAYASHI Tsukasa

  Nissin Electric Co.

• YANO Hiroshi

  Nara Institute of Science and Technology

• HATAYAMA Tomoaki

  Nara Institute of Science and Technology

• Ogata Kiyoshi

  Nissin Electric Co. Ltd R&d Laboratories

• Takahashi Eiji

  Nissin Electric Co. Ltd R&d Laboratories

• Fuyuki Takashi

  Nara Inst. Sci. And Technol. Nara Jpn

• Yano Hiroshi

  Nara Institute of Science and Techonology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ichikawa Kazunori

  Nara Institute of Science and Techonology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Uraoka Yukiharu

  Nara Institute of Science and Techonology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ichikawa Kazunori

  Nara Institute of Science and Technology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Ogata Kiyoshi

  Nissin Electric Co., Ltd., 47 Umezu-Takase-cho, Ukyo-ku, Kyoto 615-8686, Japan

• Hatayama Tomoaki

  Nara Institute of Science and Techonology, 8916-5 Takayama, Ikoma, Nara 630-0192, Japan

• Takahashi Eiji

  Nissin Electric Co., Ltd., 47 Umezu-Takase-cho, Ukyo-ku, Kyoto 615-8686, Japan

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