Slant Slot Antenna-Type Electron Cyclotron Resonance Plasma Source
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-09-15
著者
-
Tamura H
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
-
Watanabe S
Univ. Tokyo Tokyo Jpn
-
Watanabe S
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
-
Watanabe S
Division Of Materials Science Graduate School Of Engineering Hokkaido University
-
Kawasaki S
Faculty Of Science Saitama University
-
Kawasaki Sunao
Faculty Of Science Kanazawa University
-
Kawasaki Sunao
Department Of Physics Faculty Of Science Saitama University
-
WATANABE Seiichi
Kasado R&D Center, Power & Industrial Systems, Hitachi Ltd.
-
SUMIYA Masahiro
Kasado R&D Center, Power & Industrial Systems, Hitachi Ltd.
-
TAMURA Hitoshi
Mechanical Engineering Research Laboratory, Hitachi Ltd.
-
FURUSE Muneo
Kasado Works, Hitachi Ltd.
-
Watanabe Seiichi
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
-
Kawasaki Satoshi
Personal Computer And Communications Development Laboratories Nec Corporation
-
Tamura H
Department Of Computer Science And Electronics Kyushu Institute Of Technology
-
Tamura Hitomi
Network Design Research Center Kyushu Institute Of Technology
-
Tamura Hitoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
-
Katsuda Shinichi
Personal Computers & Communications Development Laboratories Nec Corporation
-
Tamura Hideki
Faculty Of Eng. Yamagata Univ.
-
Sumiya M
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
-
WATANABE Shigeya
Department of Engineering Physics, Faculty of Engineering, Kyoto University
関連論文
- Adsorption Properties of CH_3OH on Al(111) and Fe(100) Surfaces : A Periodic First-Principles Investigation
- X-Ray Reflectometry and Infrared Analysis of Native Oxides on Si (100) Formed by Chemical Treatment
- Transient Oxide Layer at a Thermally Grown SiO_2/Si Interface, Interpreted Based on Local Vibration and X-Ray Reflectivity
- X-Ray Reflectometry and Infrared Analysis of Native Oxides on Si(100) Formed in Chemical Treatment
- Boundary Structure of Mo/Si Multilayers for Soft X-Ray Mirrors
- Electron-Irradiation-Induced Amorphization in Mo/Si Nano-Multilayer Material
- Performance Analysis of Flow Loss Probability and Link Utilization in MPLS Networks for Traffic Engineering(MPLS)(Internet Technology IV)
- Performance Analysis of IP Datagram Transmission Delay in MPLS: Impact of Both Number and Bandwidth of LSPs of Layer 2(Special Issue on Internet Technology II)
- Monojets and Production of a New Heavy Particle : Particles and Fields
- Proposal of Cryogenic Plasmas in Liquid Helium II
- Possible Existence of a Transient Superfluid Plasma in Liquid Helium II
- Status Report on ERA Research in Japan
- Basic Investigation on Achieving High Resonance Quality Factor of Piezoelectric Vibrator
- Generation of Multifrequency Laser Emission by Injection of Two-Color Beam into Dye/Raman Composite Resonator
- Equally-Spaced Multi-Frequency Laser Emission Generated by Two-Color Stimulated Raman Effect. : Enhancement of Rotational Lines and Suppression of Vibrational Lines
- Mechanism of the Reduction of Electron Shading Charge Build-up Using Pulsed Plasma
- High-Frequency Measurements of Plasma Parameters in Electron Cyclotron Resonance Plasma Etchers(Nuclear Science, Plasmas, and Electric Discharges)
- Evaluation of Charge Passed through Gate-Oxide Films Using a Charging Damage Measurement Electrode
- Production of highly uniform electron cyclotron resonance plasmas by distribution control of the microwave electric field
- Slant Slot Antenna-Type Electron Cyclotron Resonance Plasma Source
- Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation
- Electric Field Effect in LaTiO_3/SrTiO_3 Heterostructure
- Dependence of Electric Properties of Al Atomic Chains on Structure of Chain-Electrode Junction
- Theoretical Analysis of Apparent Barrier Height on an Al Surface : Difference by Measurement Methods
- First-Principles Calculation of Vibrational Properties of a Nanostructure in Electric Fields
- Ab Initio Caleulation of Capacitance of Semi-Infinite Jellium Electrodes with a Nanoscale Gap
- First-Principles Study of Apparent Barrier Height : Surfaces, Interfaces, and Films
- Ab Initio Calculation of the Electric Properties of Al Atomic Chains under Finite Bias Voltages : Electronical Properties of Condensed Matter
- Direct Imaging of Thermodynamic Process In Atom Migration by Using Scanning Tunneling Microscopy
- Reduced Density of Missing-Dimer Vacancies on Tungsten-Contaminated Si (100)-(2×n) Surface by Hydrogen Termination
- Control of Surface Current on a Si(111) Surface by Using Nanofabrication
- Concentric Spread Plasma Source
- Theoretical Study of Ga Adsorbates around Dangling-Bond Wires on am H-Terminated Si Surface: Possibility of Atomic-Scale Ferromagnets
- Measurement of a Three-Dimensional Distribution of Microwave Electric Field in Electron Cyclotron Resonance Plasmas
- Initial Stage of Molecular Adsorption on Si(100) and H-terminated Si(100) Investigated by UHV-STM(STM-Si(001))
- Scanning Tunneling Spectroscopy of Dangling-Bond Wires Fabricated on the Si(100) -2 × 1 -H Surface
- Property Change of Si(111) Surface by Scanning Tunneling Microscope Manipulation
- Applicability of TiN Adhesion Layer Formed by Nitridation of Sputtered Ti Film to Blanket CVD-W Contact Filling
- P2-32 Load Characteristics of a Diagonally Symmetric Form Ultrasonic Motor Using a LiNbO_3 Plate(Poster session 2)
- Tunable Exchange Interaction in Quantum Dot Devices
- Quantum Chemical Calculations of Sulfur Doping Reactions in Diamond CVD
- Molecular Orbital Calculations of Sulfur Doping Reactions in Diamond CVD
- Computational Chemistry Study on Initial Stages of Nitridation of Silicon Surfaces
- Molecular Dynamics Simulations of Adhesional Forces via Hydrocarbon Films
- Nonlinear Susceptibility of Second Harmonic Generation Corresponded to the Diamond(100)Surface Structures
- Ferromagnetism in Semiconductor Dot Array
- Electric Field Effect in LaTiO_3/SrTiO_3 Heterostructure
- Thin Vibrator Alarm Using a Cantilever Piezoelectric Actuator
- Pt/PZT/n-SrTiO_3 Ferroelectric Memory Diode
- Emittance Diagram of Electron Beams Generated by a Field-emitter Array
- Emittance Measurement of High-Brightness Microbeams
- Quadrupled Compact Disk-Read Only Memory Fabricated Using UV Light Source
- Collective Acceleration of Barium Ions in a Preformed Anode Plasma
- Compression System in ERA of IPP-Japan. : II. Experimental Result
- Observation of Equilibrium Surface Ripples of High Intensity Relativistic Electron Beams
- Compression System in ERA Device of IPP-Japan. : I. System Design
- Coaxial Marx Generator for Producing Intense Relativistic Electron Beams
- Pole Face Windings in the Todai AG Electron Synchrotron
- Identification of Formation of Conically Converging Shock Waves in an Alumina-Sphere-Dispersed Copper Rod
- Anisotropic Heating of a Copper and Graphite Powder Mixture during an Electrical Column Explosion
- Characterization and Modification of Amorphous Carbon Films Consisting of sp^2 and sp^3 Bonds Using Magneto-Plasma Dynamic Arc-Jet
- Metastable Defect Cluster Formation during Radiation-Induced Amorphization in NiTi
- Atomistic observation and simulation analysis of spatiotemporal fluctuations during radiation-induced amorphization
- Effect of Surface Modification by Ion Implantation on Hydrogenation Property of TiFe Alloy
- Dynamical Study of Spatio-Temporal Structural Fluctuations in the Intermetallic Compound Nickel-Titanium during Radiation-Induced Crystalline-to-Amorphous Transformation
- Improvement of Corrosion Resistance and Structural Change in 304 Stainless Steel by means of Ion-Mixing
- IrO_2/Pb(Zr,Ti)O_3/Pt Capacitor Degradation with D_2 Gas at Elevated Temperature
- Formation and Stability of Metallic Silicides during Ion-Beam-Mixing in the Systems of Mo/Si and Ti/Si
- Analysis of Two-Phase Path Management Scheme for MPLS Traffic Engineering
- Guiding of Intense Relativistic Electron Beams with an Axial Magnetic Field
- Improvement in Homogeneity and Ferroelectric Property on Mist Deposition Derived Pb(Zr, Ti)O_3 Thin Films by Substrate Surface Treatment
- Fabrication of Ferroelectric Pb(Zr, Ti)O_3 Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition(Surfaces, Interfaces, and Films)
- P2-36 Basic Study On a Threefold Rotatory Symmetric Form Quartz Vibrator for Triaxial Gyrosensor(Poster session 2)
- Triaxial Quartz Gyrosensor Using a Threefold Rotatory Symmetric Form Vibrator
- Improved Emitter-Base Junction with In_2O_3 in Dielectric-Base Transistor
- Growth of Epitaxial CeO_2 Films on (1012) Sapphire by Halide Source Plasma Enhanced Chemical Vapor Deposition
- Spatial Distribution and Transport of an Electron Cyclotron Resonance Plasma Generated Using Dominant-Mode Microwave
- Spatial Distribution Measurement of Microwave Electric Field Using Thermal Sensitive Paper in a Microwave Etching System
- Atomic Step Structure on Vicnal H/Si(111) Surface Formed by Hot Water Immersion
- Internal Electron Emission in Phosphorus-Doped Polycrystalline Diamond Field Emitters
- Characterization and Field Emission of Sulfur-Doped Boron Nitride Synthesized by Plasma-Assisted Chemical Vapor Deposition
- The Double-Sided Rugged Poly Si (DSR) Technology for High Density DRAMs
- Electrical and Crystallographic Properties of Sputtered-Pb(Zr,Ti)O_3 Films Treated by Rapid Thermal Annealing
- Energy Saving Scheme with an Extra Active Period for LAN Switches
- Extra U(1) Phenomenology from the E_8×E_8 Superstring Theory : Particles and Fields
- Magneto-optical Disk for Magnetic Field Modulation Recording Method with Multi-Pulsed Laser Irradiation
- Reliability Test on One-Side-Recordable Magnetooptical Disks by Block Error Rate Measurement : Media
- Reliability Test on One-Side-Recordable Magnetooptical Disks by Block Error Rate Measurement
- Magnetic Field Dependence of Critical Current Density in Superconducting Y-Ba-Cu-O and Bi-Sr-Ca-Cu-O Films (Special Issue on High-Temperature Superconducting Electronics)
- Spectroscopic Evaluation on Photosensitive Langmuir Films Using Multichannel Spectrophotometer : Techniques, Instrumentations and Measurement
- Application of Dye Laser to the Hook Method on the Population Measurement of Excited He and Ne Atoms in the Pulsed Discharge
- Boron and Phosphorus Jon Emissions from a Cu-P-Pt-B Liquid Metal Ion Source
- Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources
- Development of Phosphorus Liquid-Metal-Ion Source
- Resonance of Phase Oscillations in a Synchrotron
- Sound Field Characteristics in Air Gaps of Noncontact Ultrasonic Motor Driven by Two Flexural Standing Wave Vibration Disks
- Noncontact Ultrasonic Motor with Two Flexural Standing Wave Vibration Disks
- Optimum Design for Noncontact Ultrasonic Motor with Flexurally Vibrating Disk Using an Equivalent Circuit Considering Viscosity of Air
- Measurement of a Three-Dimensional Distribution of Microwave Electric Field in Electron Cyclotron Resonance Plasmas