Measurement of a Three-Dimensional Distribution of Microwave Electric Field in Electron Cyclotron Resonance Plasmas
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概要
- 論文の詳細を見る
We have developed an apparatus that can measure the three-dimensional distribution of microwave electric field intensity in electron cyclotron resonance (ECR) plasmas. The reflection edge of the incident microwaves depends on the plasma density in the etching chamber: it is the ECR zone when the electron density (n e) is above 1×1011 cm-3 and the electrode when n e is below 1×1011 cm-3. The spatial distribution of the ion saturation current density at the electrode is the same as that of the microwave electric field intensity at the ECR zone. Therefore, in order to obtain uniform ion saturation current density, the intensity of the microwave electric field at the ECR zone must be kept uniform.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-30
著者
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WATANABE Seiichi
Kasado R&D Center, Power & Industrial Systems, Hitachi Ltd.
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FURUSE Mumeo
Kasado Works, Hitachi Ltd.
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Tamura Hitoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Fukumasa Osamu
Department Of Electrical And Electronic Engineering Faculty Of Engineering
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Tamura Hitoshi
Mechanical Engineering Research Laboratory, Hitachi Ltd., 501 Kandatsu-Machi, Tsuchiura 315, Japan
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Watanabe Seiichi
Kasado Works, Hitachi Ltd., 794 Higashitoyoi, Kudamatsu 744, Japan
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Furuse Mumeo
Kasado Works, Hitachi Ltd., 794 Higashitoyoi, Kudamatsu 744, Japan
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