Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources
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概要
- 論文の詳細を見る
Mass and energy analyses of ions emitted from Ga-In alloy LMI sources were carried out using a double-focusing mass spectrometer to compare these data with those from single-element Ga and In LMI sources. A more distinct low energy shoulder was observed on the Ga^+ energy distribution curve for the Ga-In source at the lower source-current and the higher emitter temperature. A similar shoulder was also observed for the Ga source but not for the In source. The Ga shoulder for the Ga-In source suggests Ga preferential vaporization at the emitter and/or Ga preferential ionization in the vicinity of emitter.
- 社団法人応用物理学会の論文
- 1985-06-20
著者
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Tamura H
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
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Ishitani T
Semiconductor Energy Lab. Co. Ltd. Kanagawa Jpn
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Tamura Hifumi
Central Research Laboratory Hitachi Ltd.
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Umemura K
Frontier Research Program The Institute Of Physical And Chemical Research (riken)
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Ishitani T
Central Research Laboratory Hitachi Ltd
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Ishitani Tohru
Central Research Laboratory Hitachi Lid.
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Tamura Hitoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Tamura Hideki
Faculty Of Eng. Yamagata Univ.
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UMEMURA Kaoru
Central Research Laboratory, Hitachi Ltd.
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TAMURA HIFUMI
Central Research Lab., Hitachi Ltd.
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