A New Secondary Ion Extractor with Pierce Electrode
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1971-10-05
著者
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Tamura Hifumi
Central Research Laboratory Hitachi Ltd.
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KONDO Toshio
Central Research Laboratory, Hitachi Ltd.
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DOI Hiroshi
Central Research Laboratory, Hitachi Ltd.
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Kondo Toshio
Central Research Laboratory Hitachi Ltd.
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Doi Hiroshi
Central Research Lab. Sekisui Chemical Co.
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TAMURA HIFUMI
Central Research Lab., Hitachi Ltd.
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KONDO TOSHIO
Central Research Lab., Hitachi Ltd.
関連論文
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- Experiments on the Resolution of a Quadrupole Mass Filter
- Mass Spectrometric Study of Photoionization. I. : A New Microwave Plasma Light Source
- Some Applications of Ion Microprobe Analysis to Problems in Semiconductor Devices : A-3: DEVICE TECHNOLOGY (III)
- Boron and Phosphorus Jon Emissions from a Cu-P-Pt-B Liquid Metal Ion Source
- Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources
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- Characteristics of Microwave Plasma Observed by Spectroscopic and Mass Spectrometric Methods
- Charge Transfer in Ion-Molecule Interactions Studied by the Resonance Line of Helium
- Analog Computation of Ion Trajectories in a Mass Filter
- Mass Spectrometric Studies of Photoionization III.:Apparatus and Technique of Measurements
- Application of Characteristic Secondary Ion Mass Spectra to a Depth Analysis of Iron Aluminum Oxide
- Surface Analysis of Insulating Materials by Means of an Ion Microprobe Analyzer