Surface Analysis of Insulating Materials by Means of an Ion Microprobe Analyzer
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概要
- 論文の詳細を見る
In the analysis of insulating materials by an ion microprobe analyzer(IMA), the electrostatic charge accumulated on the sample surface may interrupt the detection of the secondary ions. But the interruption can be effectively prevented by use of a low energy electron gun. In-depth analysis of phospho-silicated glass, surface observation of granite and quantitative analysis of calcic sandstone was tried. It was made clear that the insulating materials could be analyzed stably as well as the conductive materials when the analytical conditions had been optimized
- 日本質量分析学会の論文
著者
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Shibata Atsushi
Naka Works Hitachi Ltd.
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Nakamura Kazumitsu
Naka Works Hitachi Ltd.
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HIRAHARA YOSHIHARU
Naka Works, Hitachi Ltd.,
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TAMURA HIFUMI
Central Research Lab., Hitachi Ltd.
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SHIBATA ATSUSHI
Naka Works, Hitachi Ltd.,
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