Ion Microprobe Analyzer with Wien Filter for Primary Ion Mass Separation(速報)

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概要

• 論文の詳細を見る
• 日本質量分析学会の論文

著者

• Hirose Hiroshi

  Naka Works Hitachi Ltd.

• Tamura Hifumi

  Central Research Laboratory Hitachi Ltd.

• Kondo Toshio

  Central Research Laboratory Hitachi Ltd.

• TAMURA HIFUMI

  Central Research Lab., Hitachi Ltd.

• KONDO TOSHIO

  Central Research Lab., Hitachi Ltd.

• HIROSE Hiroshi

  Naka Works, Hitachi Ltd.

関連論文

• Detection of SiO^-_2 Ions from SiO_2-Si Interface by Means of SIMS
• Detection of SiO_2-Ions from SiO_2-Si Interface by Means of SIMS
• A Plasma Ion Gun with Pierce Electrode
• A New Secondary Ion Extractor with Pierce Electrode
• Electrical Properties of Focused-Ion-Beam Boron-Implanted Silicon
• Experiments on the Resolution of a Quadrupole Mass Filter
• Boron and Phosphorus Jon Emissions from a Cu-P-Pt-B Liquid Metal Ion Source
• Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources
• Development of Phosphorus Liquid-Metal-Ion Source
• Carbon Needle Emitter for Boron and Aluminum Ion Liquid-Metal-Ion Sources
• Ion Microprobe Analyzer with Wien Filter for Primary Ion Mass Separation(速報)
• Surface Analyzer Combining Secondary Ion Mass Spectrometry and Ion Scattering Spectrometry(速報)
• Analog Computation of Ion Trajectories in a Mass Filter
• Mass Spectrometric Studies of Photoionization III.:Apparatus and Technique of Measurements
• Application of Characteristic Secondary Ion Mass Spectra to a Depth Analysis of Iron Aluminum Oxide
• Surface Analysis of Insulating Materials by Means of an Ion Microprobe Analyzer

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