Detection of SiO_2-Ions from SiO_2-Si Interface by Means of SIMS
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1976-10-05
著者
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Hirose Hiroshi
Naka Works Hitachi Ltd.
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Shibata Atsushi
Naka Works Hitachi Ltd.
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NAKAMURA Kazumitsu
Naka Works, Hitachi Ltd.
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TAMURA Hifumi
Centeal research Laboratory, Hitachi Ltd.
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TAMURA Hifumi
Central Research Laboratory, Hitachi Ltd.
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Tamura Hifumi
Centeal Research Laboratory Hitachi Ltd.
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Tamura Hifumi
Central Research Laboratory Hitachi Ltd.
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Nakamura Kazumitsu
Naka Works Hitachi Ltd.
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TAMURA HIFUMI
Central Research Lab., Hitachi Ltd.
関連論文
- Detection of SiO^-_2 Ions from SiO_2-Si Interface by Means of SIMS
- Detection of SiO_2-Ions from SiO_2-Si Interface by Means of SIMS
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