Removal of Gas Phase Ions by Energy Selection of Secondary Ions
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1974-05-05
著者
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NAKAMURA Kazumitsu
Naka Works, Hitachi Ltd.
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Tamura Hifumi
Naka Branch Central Research Laboratory Hitachi Ltd.:(present Address)central Research Laboratory Hi
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Kondo Toshio
Naka Branch Central Research Laboratory Hitachi Ltd.:(present Address)central Research Laboratory Hi
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Nakamura Kazumitsu
Naka Works Hitachi Ltd.
関連論文
- Detection of SiO^-_2 Ions from SiO_2-Si Interface by Means of SIMS
- Detection of SiO_2-Ions from SiO_2-Si Interface by Means of SIMS
- Removal of Gas Phase Ions by Energy Selection of Secondary Ions
- Surface Analysis of Insulating Materials by Means of an Ion Microprobe Analyzer