Detection of SiO^-_2 Ions from SiO_2-Si Interface by Means of SIMS

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1977-08-05

著者

• Hirose Hiroshi

  Naka Works Hitachi Ltd.

• Shibata Atsushi

  Naka Works Hitachi Ltd.

• NAKAMURA Kazumitsu

  Naka Works, Hitachi Ltd.

• TAMURA Hifumi

  Centeal research Laboratory, Hitachi Ltd.

• Tamura Hifumi

  Centeal Research Laboratory Hitachi Ltd.

• Nakamura Kazumitsu

  Naka Works Hitachi Ltd.

関連論文

• Detection of SiO^-_2 Ions from SiO_2-Si Interface by Means of SIMS
• Detection of SiO_2-Ions from SiO_2-Si Interface by Means of SIMS
• Removal of Gas Phase Ions by Energy Selection of Secondary Ions
• Ion Microprobe Analyzer with Wien Filter for Primary Ion Mass Separation(速報)
• Surface Analysis of Insulating Materials by Means of an Ion Microprobe Analyzer

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