A Plasma Ion Gun with Pierce Electrode
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1966-10-15
著者
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TAMURA Hifumi
Central Research Laboratory, Hitachi Ltd.
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Kimura Hirokazu
Central Research Laboratory Hitachi Ltd.
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Tamura Hifumi
Central Research Laboratory Hitachi Ltd.
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TAMURA HIFUMI
Central Research Lab., Hitachi Ltd.
関連論文
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- Application of Characteristic Secondary Ion Mass Spectra to a Depth Analysis of Iron Aluminum Oxide
- Surface Analysis of Insulating Materials by Means of an Ion Microprobe Analyzer