Characteristics of Microwave Plasma Observed by Spectroscopic and Mass Spectrometric Methods
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概要
- 論文の詳細を見る
The plasma light source operated in the standing wave mode are analyzed experimentally by using two methods. One is the spectroscopic method, and the other is the mass spectrometric method. Using the former method we can identify the several lines in the vacuum ultraviolet regions. There are the resonance lines and the emission lines for the carrier gas. For example, the emission lines of Ar V at 524Å, Ar VII at 462Å and He II at 304Å are generated from the argon and the helium plasma operated in the standing wave mode. On the other hand, the resonance lines of Ar I at 1048Å and He I at 584Å are generated from the plasma without the standing wave mode. Using the latter method, we can observe the mass spectrum of organic compounds irradiated with the resonance line and the emission line. In order to use as a light source of the mass spectrometer, the optimum operated conditions are determined as a function of the carrier gas pressure.
- 社団法人応用物理学会の論文
- 1967-09-05
著者
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Omura Itiro
Central Research Laboratory Hitachi Ltd.
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Doi Hiroshi
Central Research Lab. Sekisui Chemical Co.
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