High-Resolution Stress Mapping of 100-nm Devices Measured by Stress TEM

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概要

• 論文の詳細を見る
• 2001-09-25

著者

• UMEMURA Kaoru

  Naka Division, Hitachi High-Technologies Corporation

• Umemura Kaoru

  Naka Division Hitachi High-technologies Corporation

• UMEMURA Kaoru

  Central Research Laboratory, Hitachi Ltd.

• Nakamura Kuniyasu

  Central Research Laboratory Hitachi Ltd.

• Nakamura Kuniyasu

  Central Research Laboratory Hitachi Ltd

• Koguchi M

  Hitachi Ltd Tokyo Jpn

• Koguchi Masanari

  Central Research Laboratory Hitachi Ltd

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