Emission of Doubly Charged Dimer Ions from Liquid-Metal Ion Sources : Techniques, Instrumentations and Measurement
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概要
- 論文の詳細を見る
Emission of doubly charged ions, M^<2+>_2 , from liquid-metal ion sources (LMISs) is observed. The Sb^<2+>_2 peak is confirmed in the mass spectrum of ions emitted from LMIS using gold antimonide (Au-Sb) alloy. The Sb^<2+>_2 intensity is about 18% of the (Sb^+ +Sb^<2+>_2) intensity after isotope correction and accounts for approximately 3% of total emission intensities at a total ion current of 20 _μA. The Sb^<2+>_2 ions emitted from platinum antimonide (Pt-Sb) LMIS, on the other hand, have only several tenths of 1% of the (Sb^+ +Sb^<2+>_2) intensity. A strong dependence of Sb^<2+>_2 intensity upon the source matrix is found.
- 社団法人応用物理学会の論文
- 1988-12-20
著者
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Ishitani T
Semiconductor Energy Lab. Co. Ltd. Kanagawa Jpn
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Umemura K
Frontier Research Program The Institute Of Physical And Chemical Research (riken)
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Ishitani T
Central Research Laboratory Hitachi Ltd
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Ishitani Tohru
Central Research Laboratory Hitachi Lid.
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KAWANAMI Yoshimi
Central Research Laboratory, Hitachi Ltd.
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UMEMURA Kaoru
Central Research Laboratory, Hitachi Ltd.
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Kawanami Y
Central Research Laboratory Hitachi Ltd.
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Kawanami Yoshimi
Central Research Laboratory Hitachi Ltd.
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