A new FIB fabrication method for micropillar specimens for three-dimensional observation using scanning transmission electron microscopy
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概要
- 論文の詳細を見る
- 2004-10-01
著者
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KOGUCHI Masanari
Central Research Laboratory, Hitachi Ltd.
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Fukuda Muneyuki
Central Research Laboratory Hitachi Ltd.
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TOMIMATSU Satoshi
Central Research Lab., Hitachi, Ltd.
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UMEMURA Kaoru
Naka Division, Hitachi High-Technologies Corporation
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Umemura Kaoru
Naka Division Hitachi High-technologies Corporation
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NAKAMURA Kuniyasu
Central Research Laboratory, Hitachi Ltd.
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SHICHI Hiroyasu
Central Research Laboratory, Hitachi Ltd.
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Shichi Hiroyasu
Central Research Laboratory Hitachi Ltd.
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Tomimatsu Satoshi
Central Research Laboratory Hitachi Ltd.
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Nakamura Kuniyasu
Central Research Laboratory Hitachi Ltd.
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Nakamura Kuniyasu
Central Research Laboratory Hitachi Ltd
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Koguchi M
Hitachi Ltd Tokyo Jpn
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Koguchi Masanari
Central Research Laboratory Hitachi Ltd
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