A specimen-drift-free EDX mapping system in a STEM for observing two-dimensional profiles of low dose elements in fine semiconductor devices
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概要
- 論文の詳細を見る
- Published for the Japanese Society of Electron Microscopy by Oxford University Pressの論文
- 2002-06-01
著者
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KOGUCHI Masanari
Central Research Laboratory, Hitachi Ltd.
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Tsuneta Ruriko
Central Research Laboratory Hitachi Ltd
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Nishida Akio
Semiconductor * Integrated Circuits Division Hitachi Ltd
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NAKAMURA Kuniyasu
Central Research Laboratory, Hitachi Ltd.
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Nakamura Kuniyasu
Central Research Laboratory Hitachi Ltd
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Koguchi Masanari
Central Research Laboratory Hitachi Ltd
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