Liquid Metal Ion Sources : Normalization of Virtual Source Size and Angular Ion Intensity
スポンサーリンク
概要
- 論文の詳細を見る
Normalization of liquid metal ion source (LMIS) features such as angular ion intensity and virtual source size has been proposed. The derived form for the normalized angular ion intensity is verified by the experimental data for Ga, Ga-In, Ga-In-Sn, and Cs LMISs.
- 社団法人応用物理学会の論文
- 1994-03-15
著者
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Ishitani T
Semiconductor Energy Lab. Co. Ltd. Kanagawa Jpn
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Umemura K
Frontier Research Program The Institute Of Physical And Chemical Research (riken)
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Ishitani T
Central Research Laboratory Hitachi Ltd
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KAWANAMI Yoshimi
Central Research Laboratory, Hitachi Ltd.
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Ishitani Tohru
Instrument Division Hitachi Ltd.
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UMEMURA Kaoru
Central Research Laboratory, Hitachi Ltd.
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Kawanami Y
Central Research Laboratory Hitachi Ltd.
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Kawanami Yoshimi
Central Research Laboratory Hitachi Ltd.
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Ishitani Tohru
Instrument Division Hitachi Ltd
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