Micromachining and Device Transplantation Using Focused Ion Beam
スポンサーリンク
概要
- 論文の詳細を見る
During the past ten years, a number of focused ion beam (FIB) applications in microelectronics have been demonstrated and steadily identified. In this paper, we will review FIB micromachining and device transplantation, in which processes of FIB sputtering, redeposition, and/or FIB-assisted deposition are well utilized. The FIB 3-dimensional micromachining is demonstrated with the aid of a sample rotator. Good prospects in the device transplantation are identified as a new high-resolution method for microdevice assembly and device repair. These FIB applications can be visually performed using scanning ion microscope (SIM) images. Specifications of the FIB apparatus for these applications and FIB micromachining simulation are also discussed.
- 社団法人応用物理学会の論文
- 1990-10-20
著者
-
Ishitani T
Semiconductor Energy Lab. Co. Ltd. Kanagawa Jpn
-
Ishitani T
Central Research Laboratory Hitachi Ltd
-
Ishitani Tohru
Central Research Laboratory Hitachi Ltd.
-
Ishitani Tohru
Central Research Laboratory Hitachi Lid.
-
KAWANAMI Yoshimi
Central Research Laboratory, Hitachi Ltd.
-
Ohnishi T
International Center For Materials Nanoarchitectonics (mana) National Institute For Materials Scienc
-
OHNISHI Tsuyoshi
Central Research Laboratory, Hitachi, Ltd
-
Kawanami Y
Central Research Laboratory Hitachi Ltd.
-
Kawanami Yoshimi
Central Research Laboratory Hitachi Ltd.
関連論文
- Marked Enhancement of Photoconductivity and Quenching of Luminescence in Poly(2,5-dialkoxy-p-phenylene vinylene) upon C_ Doping
- A method for multidirectional TEM observation of a specific site at atomic resolution
- Hetero-Epitaxial Growth of ZnO Film by Temperature-Modulated Metalorganic Chemical Vapor Deposition
- Molecular layer-by-layer growth of C-60 thin films by continuous-wave infrared laser deposition
- Growth and Characterization of Ferroelectric Pb(Zr, Ti)O_3 Films on Interface-Controlled CeO_2(111)/Si(111) Structures
- Metallic LaTiO_3 / SrTiO_3 Superlattice Films on the SrTiO_3(100) Surface
- Magnetic Properties of Strain-Controlled SrRuO_3 Thin Films
- Combinatorial Synthesis of Transition Metal Oxide Superlattices (特集:表面科学研究のコンビナトリアルケミストリー)
- Direct Observation of Helical Polysilane Nanostructures by Atomic Force Microscopy
- Room-Temperature Epitaxial Growth of CeO_2 Thin Films on Si(111) Substrates for Fabrication of Sharp Oxide/Silicon Interface
- Color-Variable Light-Emitting Diode Utilizing Conducting Polymer Containing Fluorescent Dye
- Aluminum-Line Cutting End-Monitor Utilizing Scanning-Ion-Microscope Voltage-Contrast Images
- Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10kV and 40kV
- High Dose Rate Effect of Focused-Ion-Beam Boron Implantation into Silicon
- Application of a FIB-STEM system for 3D observation of a resin-embedded yeast cell
- Improvements in performance of focused ion beam cross-sectioning : aspects of ion-sample interaction
- Submicron Channel MOSFET Using Focused Boron Ion Beam Implantation into Silicon
- Monte Carlo Simulation of Energetic Ion Behavior in Amorphous Targets
- Micromachining and Device Transplantation Using Focused Ion Beam : Etching and Deposition Technology
- Micromachining and Device Transplantation Using Focused Ion Beam
- Proposal for Device Transplantation using a Focused Ion Beam
- Electrical Properties of Focused-Ion-Beam Boron-Implanted Silicon
- Extracted-Beam Divergence Calculations for a Liquid-Metal Ion Source
- Droplet and Cluster Ion Emission from Ga and In Liquid Metal Ion Sources
- Focused Ion Beam Induced Deposition in the High Current Density Region : Focused Ion Beam Process
- Focused Ion Beam Induced Deposition in the High Current Density Region
- Growth of Tungsten Film by Focused Ion Beam Induced Deposition
- Simple Calculation on Topography of Focused-Ion-Beam Sputtered Surface
- Focused-Ion-Beam Broadening Due to Collisions with Residual Gas Atoms
- Boron and Phosphorus Jon Emissions from a Cu-P-Pt-B Liquid Metal Ion Source
- Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources
- Development of Phosphorus Liquid-Metal-Ion Source
- Liquid Metal Ion Sources : Normalization of Virtual Source Size and Angular Ion Intensity
- Emission of Doubly Charged Dimer Ions from Liquid-Metal Ion Sources : Techniques, Instrumentations and Measurement
- A New Droplet Breakup Model for Dimer Ion Formation from a Gallium Liquid Metal Ion Source
- Carbon Needle Emitter for Boron and Aluminum Ion Liquid-Metal-Ion Sources
- Ion Range and Damage Calculations Using the Boltzmann Transport Equation
- Surface Analyzer Combining Secondary Ion Mass Spectrometry and Ion Scattering Spectrometry(速報)