Monte Carlo Simulation of Energetic Ion Behavior in Amorphous Targets
スポンサーリンク
概要
- 論文の詳細を見る
A Monte Carlo calculation procedure for simulating the scattering processes of an energetic ion in amorphous targets is given. This computer program can be extended to any ion-target combination up to several MeV incident energy. A high degree of simulation accuracy is obtained independently of incident energy within a reasonable amount of computer time at high as well as low incident energies. Good agreement is obtained in the comparison with calculated depth distributions for implanted ions with the experiments and other Monte Cargo results.
- 社団法人応用物理学会の論文
- 1983-02-20
著者
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Hosaka Sumio
Central Research Laboratory Hitachi Ltd.
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Ishitani Tohru
Central Research Laboratory Hitachi Ltd.
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Ishitani Tohru
Central Research Laboratory Hitachi Lid.
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SHIMASE Akira
Central Research Laboratory, Hitachi Lid.
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Shimase Akira
Central Research Laboratory Hitachi Lid.:(present Address)production Engineering Research Laboratory
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Hosaka Sumio
Central Research Laboratory Hitachi Lid.
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