Focused-Ion-Beam Broadening Due to Collisions with Residual Gas Atoms
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概要
- 論文の詳細を見る
Focused-ion-beam (FIB) broadening was investigated from the viewpoint of FIB collisiouts with residual gas. Broadening was found analytically to be proportional to r^<-2(m+1)>, where r is the radial distance and m is the potential parameter. The 70 keV B^+-FIB profile was measured resist exposure. The experimental results provide qualitative support for the present analytical method. Other causes for FIB broadening are also discussed.
- 社団法人応用物理学会の論文
- 1987-10-20
著者
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Ishitani Tohru
Central Research Laboratory Hitachi Lid.
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KAWANAMI Yoshimi
Central Research Laboratory, Hitachi Ltd.
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SHUKURI Shoji
Central Research Laboratory, Hitachi Ltd.
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Shukuri Shoji
Central Research Laboratory Hitachi Ltd.
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Kawanami Yoshimi
Central Research Laboratory Hitachi Ltd.
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