Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-10-20
著者
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Mino Norihisa
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Mino Norihisa
Central Research Laboratories Matsushita Electric Industrial Co. Lid.
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Tamura H
R&d Center Kasado Administrative Division Power & Industrial Systems Hitachi Ltd.
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Ogawa Kazufumi
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Ogawa Kazufumi
Central Research Laboratories Matsushita Electric Industrial Co. Lid.
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Ogawa Keiichi
National Research Institute For Metals
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Ogawa K
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Ogawa K
Department Of Advanced Materials Science Faculty Of Engineering Kagawa University
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TAMURA Hideharu
Central Research Laboratories, Matsushita Electric Industrial Co. Ltd.
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HATADA Motoyoshi
Osaka Laboratory for Radiation Chemistry, Japan Atomic Energy Research Institute
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Tamura Hitoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Tamura Hideki
Faculty Of Eng. Yamagata Univ.
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Hatada M
Nard Inst. Ltd. Amagasaki Jpn
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Hatada Motoyoshi
Osaka Laboratories Japanese Association for Radiation Research on Polymers
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