Radiation Chemical Reaction and Submicron Pattern Fabrication on 10,12-Pentacosadiynoic Acid LB Films Using X-Ray Irradiation
スポンサーリンク
概要
- 論文の詳細を見る
X-ray induced polymerization of 10,12-pentacosadiynoic acid (PDA) Langmuir-Blodgett (LB) films has been studied in relation to the molecular density or arrangement for use in X-ray resists. Two typical PDA LB films of different molecular densities were polymerized to form different polymer LB films by X-ray irradiation. The low-density PDA LB films (A type) were more sensitive than the high-density PDA LB films (B type) when X-ray was irradiated in helium atmosphere and the polymerization was caused topochemically on A-type film but not on B-type film. Decomposition of polymerized films was observed by excessive irradiation of X-ray for A-type film, but not for B-type film. Using both types of PDA LB films, 0.4 $\mu$m patterns could be fabricated by X-ray exposure.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-11-20
著者
-
Mino Norihisa
Central Research Laboratories Matsushita Electric Industrial Co. Lid.
-
Ogawa Kazufumi
Central Research Laboratories Matsushita Electric Industrial Co. Lid.
-
TAMURA Hideharu
Central Research Laboratories, Matsushita Electric Industrial Co. Ltd.
-
Tamura Hideharu
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., 3-15, Yagumo-Nakamachi, Moriguchi, Osaka 570
関連論文
- Transmission Electron Microscopic Analysis of Chemically Adsorbed Monolayers by Means of Replica Technique
- Control of Pretilt Angles of Liquid Crystal Molecules in a Liquid Crystal Cell Using a Chemically Adsorbed Monolayer as an Alignment Film
- Preparation of Multilayers by Alternate Cycles of Chemical Adsorption and Electron Beam Irradiation
- Development of a Transparent and Ultrahydrophobic Glass Plate
- Formation of Fluorocarbon Monolayers on Anodized Aluminium Plates by Vapor Phase Chemical Adsorption Technique
- Discriminating Molecular Length of Chemically Adsorbed Molecules Using an Atomic Force Microscope Having a Tip Covered with Sensor Molecules (An Atomic Force Microscope Having Chemical Sensing Function)
- Preparation of Fluorocarbon Multilayers by a Chemical Adsorption Technique
- Preparation of a Polyacetylene Derivative Monolayer for Molecular Wire
- Radiation Chemical Reaction and Submicron Pattern Fabrication on 10,12-Pentacosadiynoic Acid LB Films Using X-Ray Irradiation