Characterization of Cu /Ti Multi-Layered Structure by Improved Sputter Crater Method
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概要
- 論文の詳細を見る
Layered Cu/Ti superlattice structures have been studied by an improved sputter crater method. A low-energy and large-area rastering Ar-ion beam was intensitionally used to produce a shallow and homogeneously etched crater. The Cu and Ti layers 10-20 Å thick could be observed as concentric circles with a magnification factor (lateral/depth) of 10^4〜10^5.
- 社団法人応用物理学会の論文
- 1986-06-20
著者
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Ogawa Keiichi
National Research Institute For Metals
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NAKAMURA Keikichi
National Research Institute for Metals
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ASADA Yuji
National Research Institute for Metals
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Hatano Takeshi
National Institute For Materials Science
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Asada Yuji
National Research Institute For Matals
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Hatano T
Research Center For Nanodevices And Systems Hiroshima University
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Asada Y
Kanagawa Univ. Yokohama Jpn
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Oguchi Atsushi
National Research Institute For Metals
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Nakamura Keikichi
National Resarch Institute for Metals
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