Applications of a Chemically Adsorbed Monomolecular Layer Having a Fluorocarbon Chain as an Anti-Contamination Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-12-15
著者
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野村 卓志
静岡大学電子工学研究所
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Mino Norihisa
Living Environment Development Center Matsushita Electric Industrial Co. Ltd.
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Ohtake Tadashi
Matsushita Electric Industrial Co. Ltd.
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Ogawa Keiichi
National Research Institute For Metals
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Ogawa K
Semiconductor Research Center Matsushita Electric Ind. Co. Ltd.
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Ogawa K
Department Of Advanced Materials Science Faculty Of Engineering Kagawa University
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OGAWA kazufumi
Liquid Crystal Development Group, Display Device Development Center, Matsushita Electric Industrial
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OHTAKE Tadashi
Liquid Crystal Development Group, Display Device Development Center, Matsushita Electric Industrial
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NOMURA Takaiki
Liquid Crystal Development Group, Display Device Development Center, Matsushita Electric Industrial
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SOGA Mamoru
Document Technology Development Center, Matsushita Electric Industrial Co., Ltd.
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野村 卓志
Department Of Advanced Materials Science Faculty Of Engineering Kagawa University
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Soga Mamoru
Document Technology Development Center Matsushita Electric Industrial Co. Ltd.
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