Measurement of a Three-Dimensional Distribution of Microwave Electric Field in Electron Cyclotron Resonance Plasmas
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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FUKUMASA Osamu
Department of Electronics, Kyoto University
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Watanabe S
Univ. Tokyo Tokyo Jpn
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WATANABE Seiichi
Kasado R&D Center, Power & Industrial Systems, Hitachi Ltd.
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TAMURA Hitoshi
Mechanical Engineering Research Laboratory, Hitachi Ltd.
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FURUSE Mumeo
Kasado Works, Hitachi Ltd.
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