Measurement of Glancing Incidence-Exit X-ray Scattering in Reflection High Energy Electron Diffraction and Total-Reflection-Angle X-ray Spectroscopy System

概要

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We developed the total-reflection-angle X-ray spectroscopy in reflection high energy electron diffraction (RHEED-TRAXS) experiments method (measuring X-rays at glancing exit angle) by introducing glancing incidence X-rays into a RHEED-TRAXS system so that the measurement of glancing incidence-exit X-ray scattering (GIEXS) has been realized. Nanometer scale islands, deposited on a sample surface in the RHEED-TRAXS system, were excited by an electron beam to generate characteristic X-rays. These X-rays impinge on the sample surface at small glancing angle to play a role of glancing incidence; thus, the TRAXS observation of the X-rays emitted from islands is equivalent to X-ray measurement under glancing incidence-exit geometry. Applying the GIEXS method to surface layer analysis for the SrTiO_3 (001) single crystal, we found that the critical angle of total reflection observed by the GIEXS method can be used to determine the composition of the surface atomic layer.
社団法人応用物理学会の論文
1996-10-15