Deposition Pressure Effects on the Laser Plume of YBa_2Cu_3O_<7-δ>
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概要
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The control of the preferential orientation in oxide superconducting films, which is generally done by deposition temperatures, was achieved by choosing the oxygen pressures during the deposition. Time-resolved optical observations of the laser plume were carried out at the same time with the film deposition. Upon increasing the oxygen pressure, the velocities of the emissive species ablated from the target were decreased. The kinetic energy effects of the ablated species on the film orientation are discussed, and the orientation change can be qualitatively understood by a surface migration model as well as the case of the deposition temperature dependence.
- 社団法人応用物理学会の論文
- 1991-09-15
著者
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TANAKA Shoji
Superconductivity Research Laboratory, International Superconductivity Technology Center
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SAWADA Takashi
NTT Science and Core Laboratory Group
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Morishita Tadataka
Superconductivity Research Laboratory International Superconductivity Technology Center
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Morishita Tadataka
Superconductivity Research Laboratory Istec
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Sawada T
Ntt Science And Core Laboratory Group
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IZUMI Hirohiko
Superconductivity Research Laboratory, ISTEC
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OHATA Katsumi
Superconductivity Research Laboratory, ISTEC
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SAWADA Takashi
Superconductivity Research Laboratory, ISTEC
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Ohata Katsumi
Superconductivity Research Laboratory Istec
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Izumi H
Fujitsu Lab. Ltd. Akasi Jpn
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Tanaka Shoji
Superconductivity Research Laboratory International Superconductivity Technology Center
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Tanaka Shoji
Superconductivity Research Laboratory Istec
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