Fabrication of YBaCuO-Josephson-Junctions on MgO-Substrates Damaged by a Focused Ion Beam Prior to Film Deposition
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概要
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By using a focused Ga-ion-beam we have damaged micro-areas of MgO-substrates through a protective gold-layer. Two different types of damage are produced: the flat type is to damage the surface by the implantation of Ga-ions whereas the groove type is simply geometrical damage to the substrates by sputtering the MgO. A YBa_2Cu_3O_<7-x> (YBaCuO)-film was deposited on the as prepared substrates and the final junction was then defined by photolithography and Ar-milling over the damaged region. Under microwave irradiation Shapiro-steps were observed on these junctions, and a R_n×I_c of up to 3 mV at 4.2 K was achieved for the flat type junctions.
- 社団法人応用物理学会の論文
- 1993-05-15
著者
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SUZUKI Katsumi
Superconductivity Research Laboratory,ISTEC
-
Enomoto Youichi
Superconductivity Research Laboratory International Superconductivity Technology Center
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Neumann Christian
Superconductivity Research Laboratory International Superconductivity Technology Center
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Tanaka Shoji
Superconductivity Research Laboratory International Superconductivity Technology Center
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