Excimer Laser-Assisted Chemical Vapor Deposition of Metal-Oxide Thin Film from β-Diketone Complexes
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概要
- 論文の詳細を見る
The effects of excimer laser irradiation (KrF: 248 nm) on the CVD of single-source systems (Y(thd)_3, Ba(thd)_2, and Cu(thd)_2, where (thd) represents 2, 2, 6, 6-tetramethyl-3, 5-heptanedionate), and double-source systems (Y-Ba, Ba-Cu, and Y-Cu) were investigated. In the single-source system, the laser irradiation promotes the crystallization and oxidation of the deposited oxides, but there is no remarkable change in the deposition rates. On the other hand, in the double-source systems (Ba-Cu and Y-Cu), the irradiation increases the deposition rates and the Cu reactivity with Ba and Y in the vapor phase, and also promotes the crystallization and the oxidation through the uptake of activated oxygen into the films during deposition.
- 社団法人応用物理学会の論文
- 1991-01-01
著者
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TANAKA Shoji
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Ushida Takahisa
Superconductivity Research Laboratory Nagoya Division International Superconductivity Technology Cen
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Hirabayashi I
Superconductivity Research Laboratory International Superconductivity Technology Center
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Hirabayashi Izumi
Superconductivity Research Laboratory International Superconductivity Technology Center
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Higashiyama K
Univ. Tsukuba Ibaraki Jpn
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HIGASHIYAMA Kazutoshi
Superconductivity Research Laboratory, Nagoya Division, International Superconductivity Technology C
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Uchida Takahisa
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Tanaka Shoji
Superconductivity Research Laboratory International Superconductivity Technology Center
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Hirabayashi Izumi
Superconductivity Research Laboratory (SRL), International Superconductivity Technology Center (ISTEC), 1-10-13 Shinonome, Koto-ku, Tokyo 135-0062, Japan
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