Boron Doping for p-Type β-FeSi_2 Films by Sputtering Method
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2004-04-01
著者
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Kuroda Ryo
National Institute Of Advanced Industrial Science And Technology (aist)
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LIU Zhengxin
National Institute of Advanced Industrial Science and Technology (AIST)
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FUKUZAWA Yasuhiro
Kankyo Semiconductors Co., Ltd.
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MAKITA Yunosuke
National Institute of Advanced Industrial Science and Technology (AIST)
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TANOUE Hisao
National Institute of Advanced Industrial Science and Technology (AIST)
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OTOGAWA Naotaka
Kankyo Semiconductors Co., Ltd.
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NAKAYAMA Yasuhiko
Kankyo Semiconductors Co., Ltd.
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LIU Zhengxin
System Engineers' Co., Ltd.
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OSAMURA Masato
System Engineers' Co., Ltd.
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OOTSUKA Teruhisa
System Engineers' Co., Ltd.
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WANG Shinan
Kankyo Semiconductors Co., Ltd.
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SUZUKI Yasuhito
System Engineers' Co., Ltd.
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MISE Takahiro
System Engineers' Co., Ltd.
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Tanoue H
Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology
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Tanoue H
National Institute Of Advanced Industrial Science And Technology (aist)
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Mise Takahiro
System Engineers' Co. Ltd.
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Osamura Masato
System Engineers' Co. Ltd.
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Wang Shinan
Kankyo Semiconductors Co. Ltd.
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Makita Y
National Institute Of Advanced Industrial Science And Technology (aist)
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Nakayama Yasuhiko
Kankyo Semiconductors Co. Ltd.
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Otogawa Naotaka
Kankyo Semiconductors Co. Ltd.
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Ootsuka Teruhisa
System Engineers' Co. Ltd.
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Fukuzawa Yasuhiro
Kankyo Semiconductors Co. Ltd.
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Suzuki Yasuhito
System Engineers' Co. Ltd.
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Liu Zhengxin
System Engineers' Co., Ltd., Yamato, Kanagawa 242-0001, Japan
関連論文
- Fluorescence-Detected X-Ray Absorption Spectroscopy Applied to Structural Characterization of Very Thin Films;Ion-Beam-Induced Modification of Thin Ni Layers on Si(100)
- Demonstration of Dopant Profiling in Ultrathin Channels of Vertical-Type Double-Gate Metal-Oxide-Semiconductor Field-Effect-Transistor by Scanning Nonlinear Dielectric Microscopy
- Novel Process for Vertical Double-Gate (DG) Metal-Oxide-Semiconductor Field-Effect-Transistor (MOSFET) Fabrication
- Doping of β-FeSi_2 Thin Film with Aluminum Prepared by Molecular Beam Epitaxy
- Arsenic Doping of n-Type β-FeSi_2 Films by Sputtering Method
- Boron Doping for p-Type β-FeSi_2 Films by Sputtering Method
- Fabrication of Metal-Oxide-Semiconductor Field-Effect-Transistor-Structured Silicon Field Emitters with a Polysilicon Dual Gate
- Fabrication of a New Si Field Emitter Tip with Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) Structure
- Development of Bipolar-pulse Accelerator for Intense Pulsed Ion Beam Acceleration
- Formation of β-FeSi_2 Microstructures by Reactive Ion Etching Using SF_6 Gas
- Dependence of Hooge Parameter of Compound Semiconductors on Temperature
- Measurement of Glancing Incidence-Exit X-ray Scattering in Reflection High Energy Electron Diffraction and Total-Reflection-Angle X-ray Spectroscopy System
- Formation of $\beta$-FeSi2 Microstructures by Reactive Ion Etching Using SF6 Gas
- Arsenic Doping of $n$-Type $\beta$-FeSi2 Films by Sputtering Method