First observation of SiO_2/Si(100) interfaces by spherical aberration-corrected high-resolution transmission electron microscopy

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概要

• 論文の詳細を見る
• 2003-02-01

著者

• Usuda Koji

  Lsi Basic Technology Laboratory Toshiba Co.

• IKARASHI Nobuyuki

  Silicon Systems Research Labs., NEC Corporation

• Yamasaki Jun

  Department Of Chemistry Faculty Of Science Kochi University

• Yamasaki Jun

  Department Of Crystalline Materials Science And C. I. R. S. E. Of Nagoya University

• Tanaka Nobuo

  Department Of Agro-environmental Sciences Graduate School Of Bioresource And Bioenvironmental Scienc

• Ikarashi Nobuyuki

  Silicon Systems Research Laboratories Nec Corporation

• Ikarashi Nobuyuki

  Silicon Systems Research Laboratory Nec Co.

• Tanaka Nobuo

  Department Of Crystalline Materials Science And C. I. R. S. E. Of Nagoya University

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