Electron Energy-Loss Spectroscopy of Carbon Films Prepared by Electron-Cyclotron-Resonance Plasma Sputtering

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概要

• 論文の詳細を見る
• Japan Institute of Metalsの論文
• 2002-08-01

著者

• TANAKA Nobuo

  Department of Life Science, Tokyo Institute of Technology

• Hirono S

  Ecr Plasma Systems Division Ntt Afty Corporation

• Hirono Shigeru

  Ecr Plasma Systems Division Ntt Afty Corporation

• Tanaka Nobuo

  Department Of Intercultural Studies Faculty Of Cultural Studies Kyoto Sangyo University

• HIBINO Michio

  Center for Integrated Research in Science & Engineering Nagoya University

• Hibino Michio

  Center For Integrated Research In Science And Engineering Nagoya University

• MUROOKA Yoshie

  Center for Integrated Research in Science and Engineering, Nagoya University

• Murooka Yoshie

  Center For Integrated Research In Science And Engineering Nagoya University

• Tanaka Nobuo

  Department Of Agro-environmental Sciences Graduate School Of Bioresource And Bioenvironmental Scienc

• Tanaka Nobuo

  Department Of Applied Physics Nagoya University

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