Pulsed-Source MOCVD of High-k Dielectric Thin Films with in situ Monitoring by Spectroscopic Ellipsometry
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-30
著者
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ODA Shunri
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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Hattori Takeo
Department of Electrical and Electronic Engineering, Musashi Institute of Technology
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Oda Shunri
Research Center For Quantum Effect Electronics And Department Of Physical Electronics Tokyo Institut
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TSUCHIYA Yoshishige
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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ENDOH Masato
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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KUROSAWA Masatoshi
Department of Electrical and Electronic Engineering, Musashi Institute of Technology
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TUNG Raymond
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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Tung Raymond
Research Center For Quantum Effect Electronics Tokyo Institute Of Technology
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Endoh Masato
Research Center For Quantum Effect Electronics Tokyo Institute Of Technology
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Hattori Takeo
Department Of Electrical & Electronic Engineering Musashi Institute Of Technology
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Kurosawa Masatoshi
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Tsuchiya Yoshishige
Research Center For Quantum Effect Electronics Tokyo Institute Of Technology
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