ディジタルプロセスによる微結晶シリコンの作製と量子効果超集積デバイスへの応用
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概要
著者
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小田 俊理
東工大工
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小田 俊理
東京工業大学量子ナノエレクトロニクス研究センター
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Oda S
Tokyo Inst. Technol. Tokyo Jpn
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Oda Shunri
Research Center For Quantum Effect Electronics And Department Of Physical Electronics Tokyo Institut
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Oda Shunri
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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