Atomic Layer-by-Layer Metal-Organic Chemical Vapor Deposition of SrTiO_3 Films with a Very Smooth Surface
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概要
- 論文の詳細を見る
- 物理系学術誌刊行センターの論文
- 1998-03-15
著者
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小田 俊理
東工大工
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小田 俊理
東京工業大学量子ナノエレクトロニクス研究センター
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ODA Shunri
Research Center for Quantum Effect Electronics, Tokyo Institute of Technology
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WANG Zaiyang
Department of Physical Electronics, Tokyo Institute of Technology
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Wang Zaiyang
Department Of Physical Electronics Tokyo Institute Of Technology
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Oda S
Tokyo Inst. Technol. Tokyo Jpn
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Oda Shunri
Research Center For Quantum Effect Electronics And Department Of Physical Electronics Tokyo Institut
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Oda Shunri
The Graduate School At Nagatsuta Tokyo Institute Of Technology
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