Preferential Nucleation of Nanocrystalline Silicon along Microsteps

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概要

• 論文の詳細を見る
• 1996-02-01

著者

• ODA Shunri

  Research Center for Quantum Effect Electronics, Tokyo Institute of Technology

• Kawahara J

  Assoc. Super-advanced Electronics Technol. (aset) Ibaraki Jpn

• OTOBE Masanori

  Research Center for Quantum Effect Electronics and Department of Physical Electronics, Tokyo Institu

• KAWAHARA Jun

  Research Center for Quantum Effect Electronics, Tokyo Institute of Technology

• Otobe M

  Research Center For Quantum Effect Electronics And Department Of Physical Electronics Tokyo Institut

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