Atomic Scale Oxidation Process on Hydrogen-Terminated Silicon Surface
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概要
- 論文の詳細を見る
- 1996-08-26
著者
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Katayama Mitsuhiro
Osaka Univ. Osaka Jpn
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YAMAMOTO Hiroshi
Department of Macromolecular Science, Graduate School of Science, Osaka University
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HATTORI Toshiaki
Institute of Applied Physics, University of Tsukuba
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Tate Naoto
Shin-Etsu Handotai Co. Ltd.
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Katayama Masatake
Shin-Etsu Handotai Co. Ltd.
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Hattori Takeo
Department of Electrical and Electronic Engineering, Musashi Institute of Technology
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NOHIRA Hiroshi
Department of Electrical and Electronic Engineering, Musashi Institute of Technology
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Nohira Hiroshi
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Hattori T
Tohoku Univ. Miyagi Jpn
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Hattori Takeo
Department Of Electrical & Electronic Engineering Musashi Institute Of Technology
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OKUBE Yohichi
Department of Electrical and Electronic Engineering, Musashi Institute of Technology
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IIJIMA Etsuo
Department of Electrical and Electronic Engineering, Musashi Institute of Technology
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Iijima Etsuo
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Okube Yohichi
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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Katayama M
Shin‐etsu Handotai Co. Ltd. Gunma Jpn
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Yamamoto Hiroshi
Department Of Energy Engineering And Science Nagoya University
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Katayama Mitsuhiro
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka U
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Yamamoto Hiroshi
Departmemt Of Chemical Engineering University Of Tokyo
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Katayama Mitsuhiro
Division Of Electrical Electronic And Information Engineering Graduate School Of Engineering Osaka University
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Yamamoto Hiroshi
Department Of Electrical And Electronic Engineering Musashi Institute Of Technology
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