Large-Area MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSIs
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-01-20
著者
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Ohori Tatsuya
Fujitsu Laboratories Ltd.
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Itoh Hisayoshi
Institute Of Materials Science University Of Tsukuba
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Itoh H
Semiconductor Academic Research Center
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Itoh Hitoshi
Semiconductor Academic Research Center
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KASAI Kazumi
Fujitsu Laboratories Ltd.
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KOMENO Junji
Fujitsu Laboratories Ltd.
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TOMESAKAI Nobuaki
Fujitsu Ltd.
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TANAKA Hitoshi
Fujitsu Laboratories Ltd.
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ITOH Hiromi
Fujitsu Laboratories Ltd.
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MAKIYAMA Kozo
Fujitsu Laboratories Ltd.
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OKABE Tadao
Fujitsu Laboratories Ltd.
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TAKIKAWA Masahiko
Fujitsu Laboratories Ltd.
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Kasai K
Fujitsu Laboratories Ltd.
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Komeno J
Fujitsu Laboratories Ltd.
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Takikawa M
Fujitsu Laboratories Ltd.
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