Donor Neurtalization by Fluorine Containing Plasmas in Si-Doped n-Type GaAs Crystals
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-04-01
著者
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Wada J
Fujitsu Laboratories Ltd.
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TANAKA Hitoshi
Fujitsu Laboratories Ltd.
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WADA Jun
Fujitsu Laboratories Ltd.
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MATSUKURA Yusuke
Fujitsu Laboratories Ltd.
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OGIHARA Toshihiro
Fujitsu Quantum Devices Ltd.
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FURUKAWA Yukihiko
Fujitsu Quantum Devices Ltd.
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