Warp Reduction of High-Electron-Mobility-Transistor on Si Wafer by In-Doped Selectively Doped Heterostructure and Strained-Layer Superlattice Buffer Layer
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-08-15
著者
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Ohori Tatsuya
Fujitsu Laboratories Ltd.
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SUEHIRO Haruyoshi
Fujitsu Laboratories Ltd.
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KASAI Kazumi
Fujitsu Laboratories Ltd.
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KOMENO Junji
Fujitsu Laboratories Ltd.
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Kasai K
Fujitsu Laboratories Ltd.
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Komeno J
Fujitsu Laboratories Ltd.
関連論文
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