Surface Morphology and Line Fill Properties of Gold Grown by Organometallic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-30
著者
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KASAI Kazumi
Fujitsu Laboratories Ltd.
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KOMENO Junji
Fujitsu Laboratories Ltd.
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Hoshino M
Fujitsu Laboratories Ltd.
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Kasai K
Fujitsu Laboratories Ltd.
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Komeno J
Fujitsu Laboratories Ltd.
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HOSHINO Masataka
Fujitsu Laboratories Ltd.
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Hoshino Masataka
Fujitsu Laboratories Lid.
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- Chemical-Mechanical Polishing of Metalorganic Chemical-Vapor-Deposited Gold for LSI Interconnection
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