Chemical-Mechanical Polishing of Metalorganic Chemical-Vapor-Deposited Gold for LSI Interconnection

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Warp Reduction of High-Electron-Mobility-Transistor on Si Wafer by In-Doped Selectively Doped Heterostructure and Strained-Layer Superlattice Buffer Layer
Metalorganic Vapor Phase Epitaxial Growth for High Electron Mobility Transistor LSIs
AlGaAs/GaAs and AlGaAs/InGaAs/GaAs High Electron Mobility Transistors Grown by Metalorganic Vapor Phase Epitaxy Using Tertiarybutylarsine
Large-Area MOVPE Growth of AlGaAs/GaAs Heterostructures for HEMT LSIs
MOVPE Growth of AlGaAs /GaAs Heterostructures for HEMT LSI
Multi-Wafer Growth of HEMT LSI Quality AlGaAs/GaAs Heterostructures by MOCVD
Chemical-Mechanical Polishing of Metalorganic Chemical-Vapor-Deposited Gold for LSI Interconnection
Surface Morphology and Line Fill Properties of Gold Grown by Organometallic Chemical Vapor Deposition
A Mass Spectrometric Study of the Decomposition of Trimethylgallium (TMGa) with Trimethylarsine (TMAs)
Observation of Donor-Related Deep Levels in Ga_xIn_P (0.52≦x≦0.71) : Semiconductors and Semiconductor Devices
Two-Dimensional-Electron Gas in Undoped and Selectively-Doped GaInP/GaAs Heterostructures Grown by Chloride-Vapor-Phase Epitaxy
Near-Band-Edge Photoluminescenee of High-Purity Ga_xIn_P Grown by Chloride Vapor-Phase Epitaxy
Donor-Related Deep Level in S-Doped Ga_In_P Grwon by Chloride VPE
Photoluminescence Excitation Spectroscopy of In_Ga_,As/InP Multi-Quantum-Well Heterostructures
Shallow and Deep Donor Levels in S-Doped Ga_In_P Grown by Chloride VPE
Two-Dimensional Electron Gas at GaAs/Ga_In_P Heterointerface Grown by Chloride Vapor-Phase Epitaxy
Growth of InGaAsP Quaternary by Chloride VPE
Pyrolysis of Trimethylgallium on GaAs Surfaces Observed by Pulse Surface Reaction Rate Analysis
Magnetophonon Effect and Energy Band Parameters of InP
Magnetophonon Resonance in n-InP : Physical Acoustics
Emission Mechanism in In_Ga_As/InP Quantum-Well Heterostructures Grown by Chloride Vapor-Phase Epitaxy
MOVPE Growth of Selectively Doped AlGaAs/GaAs Heterostructures with Tertiarybutylarsine
Effect of Adding CO_2 to CH_4/H_2 Mixture for InGaAs/GaAs Selective Reactive Ion Etching
Nonalloyed Ohmic Contacts for HEMTs Using n^+-InGaAs Layers Grown by MOVPE (Special Issue on Heterostructure Devices and Epitaxial Growth Techniques)
Atomic Structure of Ordered InGaP Crystals Grown on (001)GaAs Substrates by Metalorganic Chemical Vapor Deposition

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